The University of Southampton
University of Southampton Institutional Repository

Fundamentals and state of the art

Fundamentals and state of the art
Fundamentals and state of the art
Resonant sensors offer a high performance solution to many sensing applications. This paper presents a review of resonant microsensors based upon resonant structures fabricated in silicon, quartz and gallium arsenside. The methods of coupling the resonator to the measurand are discussed and example sensors for pressure, acceleration and rotation sensing applications are introduced. Important design considerations such as resonator geometry, the Q-factor, nonlinear behaviour, power consumption and packaging are analysed. Lastly the relative merits of silicon, quartz and GaAs as a resonator material are reviewed.
0914-4935
457-471
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d

Tudor, M.J. and Beeby, S.P. (1997) Fundamentals and state of the art. Sensors and Materials, 9 (8), 457-471.

Record type: Article

Abstract

Resonant sensors offer a high performance solution to many sensing applications. This paper presents a review of resonant microsensors based upon resonant structures fabricated in silicon, quartz and gallium arsenside. The methods of coupling the resonator to the measurand are discussed and example sensors for pressure, acceleration and rotation sensing applications are introduced. Important design considerations such as resonator geometry, the Q-factor, nonlinear behaviour, power consumption and packaging are analysed. Lastly the relative merits of silicon, quartz and GaAs as a resonator material are reviewed.

Text Resonant Microsensors Fundamentals and State of the Art.pdf - Other
Download (195kB)

More information

Published date: 1997
Additional Information: Special issue: Resonant Microsensors
Organisations: EEE

Identifiers

Local EPrints ID: 256117
URI: https://eprints.soton.ac.uk/id/eprint/256117
ISSN: 0914-4935
PURE UUID: 1564f1e8-855a-47fa-961e-5c2ba0037b32
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 31 Oct 2001
Last modified: 06 Jun 2018 13:07

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×