Microprocessor implemented self validation of thick-film PZT/Silicon accelerometer
Microprocessor implemented self validation of thick-film PZT/Silicon accelerometer
This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.
168-174
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Grabham, N J
00695728-6280-4d06-a943-29142f2547c9
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
2001
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Grabham, N J
00695728-6280-4d06-a943-29142f2547c9
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S P, Grabham, N J and White, N M
(2001)
Microprocessor implemented self validation of thick-film PZT/Silicon accelerometer.
Sensors and Actuators A: Physical, 92, .
(doi:10.1016/S0924-4247(01)00559-3).
Abstract
This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.
Text
accel_self_test.pdf
- Other
More information
Published date: 2001
Additional Information:
Address: Amsterdam
Organisations:
EEE
Identifiers
Local EPrints ID: 256121
URI: http://eprints.soton.ac.uk/id/eprint/256121
ISSN: 0924-4247
PURE UUID: 5ca88cc3-b776-4e7f-99a1-fe09d4948509
Catalogue record
Date deposited: 31 Oct 2001
Last modified: 15 Mar 2024 02:46
Export record
Altmetrics
Contributors
Author:
S P Beeby
Author:
N J Grabham
Author:
N M White
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics