Development of a Magnetostrictive Thick-Film Material for MEMS Applications
Development of a Magnetostrictive Thick-Film Material for MEMS Applications
This paper describes the fabrication of a magnetostrictive thick-film material based upon the giant magnetostrictive material Terfenol-D. A system to measure the magnetostriction of the resulting thick-film is also described. Using this system the effects of adding an inert filler material to reduce voids in the film are investigated. The advantages of adding the filler material to the magnetostrictive paste are also reported.
0-750308-21-4
297-301
Grabham, NJ
00695728-6280-4d06-a943-29142f2547c9
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
September 2001
Grabham, NJ
00695728-6280-4d06-a943-29142f2547c9
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, NJ and White, NM
(2001)
Development of a Magnetostrictive Thick-Film Material for MEMS Applications.
Proceedings of Sensors and their Applications XI.
.
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Abstract
This paper describes the fabrication of a magnetostrictive thick-film material based upon the giant magnetostrictive material Terfenol-D. A system to measure the magnetostriction of the resulting thick-film is also described. Using this system the effects of adding an inert filler material to reduce voids in the film are investigated. The advantages of adding the filler material to the magnetostrictive paste are also reported.
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Published date: September 2001
Venue - Dates:
Proceedings of Sensors and their Applications XI, 2001-08-31
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EEE
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Local EPrints ID: 256404
URI: http://eprints.soton.ac.uk/id/eprint/256404
ISBN: 0-750308-21-4
PURE UUID: 3856aa82-064b-4583-bc66-5df10513218a
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Date deposited: 22 Mar 2002
Last modified: 11 Dec 2021 03:31
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Contributors
Author:
NJ Grabham
Author:
NM White
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