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Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer

Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer
Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer
This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.
0924-4247
168-74
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Grabham, NJ
00695728-6280-4d06-a943-29142f2547c9
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Grabham, NJ
00695728-6280-4d06-a943-29142f2547c9
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Grabham, NJ and White, NM (2002) Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer Sensors and Actuators A: Physical, 92, pp. 168-74.

Record type: Article

Abstract

This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.

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More information

Published date: 2002
Additional Information: Address: Amsterdam
Organisations: EEE

Identifiers

Local EPrints ID: 256623
URI: http://eprints.soton.ac.uk/id/eprint/256623
ISSN: 0924-4247
PURE UUID: 5c65d6df-d2a7-4c26-9bad-6348ac96356c
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NJ Grabham: ORCID iD orcid.org/0000-0002-6385-0331
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 17 Jun 2002
Last modified: 18 Jul 2017 09:45

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Contributors

Author: SP Beeby ORCID iD
Author: NJ Grabham ORCID iD
Author: NM White ORCID iD

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