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Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer

Beeby, SP, Grabham, NJ and White, NM (2002) Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer Sensors and Actuators A: Physical, 92, pp. 168-74.

Record type: Article


This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.

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Published date: 2002
Additional Information: Address: Amsterdam
Organisations: EEE


Local EPrints ID: 256623
ISSN: 0924-4247
PURE UUID: 5c65d6df-d2a7-4c26-9bad-6348ac96356c
ORCID for SP Beeby: ORCID iD
ORCID for NM White: ORCID iD

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Date deposited: 17 Jun 2002
Last modified: 18 Jul 2017 09:45

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Author: SP Beeby ORCID iD
Author: NJ Grabham
Author: NM White ORCID iD

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