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Development of a Magnetostrictive Thick-Film Material for MEMS Devices

Development of a Magnetostrictive Thick-Film Material for MEMS Devices
Development of a Magnetostrictive Thick-Film Material for MEMS Devices
This paper presents research being carried out at the University of Southampton into the development of a magnetostrictive thick-film material, intended for use as an actuator with MEMS devices. This magnetostrictive thick-film material has been deposited onot alumina substrates, and this paper presents work on migrating the technology onto silicon and the evaluation of the resulting magnetostrictive thick-films.
Grabham, N.J.
00695728-6280-4d06-a943-29142f2547c9
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, N.J.
00695728-6280-4d06-a943-29142f2547c9
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Grabham, N.J., Beeby, S.P. and White, N.M. (2002) Development of a Magnetostrictive Thick-Film Material for MEMS Devices. Proceedings of Eurosensors XVI.

Record type: Conference or Workshop Item (Other)

Abstract

This paper presents research being carried out at the University of Southampton into the development of a magnetostrictive thick-film material, intended for use as an actuator with MEMS devices. This magnetostrictive thick-film material has been deposited onot alumina substrates, and this paper presents work on migrating the technology onto silicon and the evaluation of the resulting magnetostrictive thick-films.

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More information

Published date: September 2002
Venue - Dates: Proceedings of Eurosensors XVI, 2002-08-31
Organisations: EEE

Identifiers

Local EPrints ID: 256631
URI: http://eprints.soton.ac.uk/id/eprint/256631
PURE UUID: 09f1edf1-50a6-4d36-b451-3bc6fa288687
ORCID for N.J. Grabham: ORCID iD orcid.org/0000-0002-6385-0331
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Jun 2002
Last modified: 11 Dec 2021 03:31

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Contributors

Author: N.J. Grabham ORCID iD
Author: S.P. Beeby ORCID iD
Author: N.M. White ORCID iD

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