Harris, N R, Beeby, S and White, N M (2002) A Silicon Microfluidic Ultrasonic Separator.
Abstract
Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, and fabrication of the device are discussed, along with the potential for future developments in the area.
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