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A Silicon Microfluidic Ultrasonic Separator

A Silicon Microfluidic Ultrasonic Separator
A Silicon Microfluidic Ultrasonic Separator
Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, and fabrication of the device are discussed, along with the potential for future developments in the area.
Harris, N R
237cfdbd-86e4-4025-869c-c85136f14dfd
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Harris, N R
237cfdbd-86e4-4025-869c-c85136f14dfd
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Harris, N R, Beeby, S and White, N M (2002) A Silicon Microfluidic Ultrasonic Separator.

Record type: Conference or Workshop Item (Other)

Abstract

Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, and fabrication of the device are discussed, along with the potential for future developments in the area.

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More information

Published date: September 2002
Organisations: EEE

Identifiers

Local EPrints ID: 256650
URI: http://eprints.soton.ac.uk/id/eprint/256650
PURE UUID: 406e86a7-1ead-48c8-800d-d1593bd9442f
ORCID for N R Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for S Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 08 Jul 2002
Last modified: 11 Dec 2021 03:01

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Contributors

Author: N R Harris ORCID iD
Author: S Beeby ORCID iD
Author: N M White ORCID iD

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