Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology. Journal of Microelectromechanical Systems, 9 (1), 104-111.
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Published date: March 2000
Organisations:
EEE
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Local EPrints ID: 256654
URI: http://eprints.soton.ac.uk/id/eprint/256654
ISSN: 1057-7157
PURE UUID: bf7b46f8-9ef5-42d1-9190-5ba64e87c036
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Date deposited: 10 Jul 2002
Last modified: 08 Jan 2022 02:39
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Contributors
Author:
SP Beeby
Author:
G Ensell
Author:
MJ Tudor
Author:
NM White
Author:
BR Baker
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