Micromachined silicon resonant strain gauges fabricated using SOI wafer technology


Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology Journal of Microelectromechanical Systems, 9, (1), pp. 104-111.

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Item Type: Article
ISSNs: 1057-7157 (print)
Organisations: EEE
ePrint ID: 256654
Date :
Date Event
March 2000Published
Date Deposited: 10 Jul 2002
Last Modified: 17 Apr 2017 23:01
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/256654

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