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Micromachined silicon resonant strain gauges fabricated using SOI wafer technology

Micromachined silicon resonant strain gauges fabricated using SOI wafer technology
Micromachined silicon resonant strain gauges fabricated using SOI wafer technology
1057-7157
104-111
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G
5ed85009-4be4-4850-b95c-fbb367b67d15
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Baker, BR
48adbbe7-33a7-41ad-a85a-e031dc44a191
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G
5ed85009-4be4-4850-b95c-fbb367b67d15
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Baker, BR
48adbbe7-33a7-41ad-a85a-e031dc44a191

Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology. Journal of Microelectromechanical Systems, 9 (1), 104-111.

Record type: Article

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More information

Published date: March 2000
Organisations: EEE

Identifiers

Local EPrints ID: 256654
URI: http://eprints.soton.ac.uk/id/eprint/256654
ISSN: 1057-7157
PURE UUID: bf7b46f8-9ef5-42d1-9190-5ba64e87c036
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for MJ Tudor: ORCID iD orcid.org/0000-0003-1179-9455
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 10 Jul 2002
Last modified: 08 Jan 2022 02:39

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Contributors

Author: SP Beeby ORCID iD
Author: G Ensell
Author: MJ Tudor ORCID iD
Author: NM White ORCID iD
Author: BR Baker

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