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Micromachined silicon resonant strain gauges fabricated using SOI wafer technology

Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology Journal of Microelectromechanical Systems, 9, (1), pp. 104-111.

Record type: Article

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Published date: March 2000
Organisations: EEE

Identifiers

Local EPrints ID: 256654
URI: http://eprints.soton.ac.uk/id/eprint/256654
ISSN: 1057-7157
PURE UUID: bf7b46f8-9ef5-42d1-9190-5ba64e87c036
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 10 Jul 2002
Last modified: 18 Jul 2017 09:44

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Contributors

Author: SP Beeby ORCID iD
Author: G Ensell
Author: MJ Tudor
Author: NM White ORCID iD
Author: BR Baker

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