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Sensitivity and mode spectrum of a frequency-output silicon pressure sensor

Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
The vibrational mode spectrum of a silicon vibrating pressure sensor is investigated. Particular attention is given to the analysis of the vibration shapes, quality factors and relative sensitivity of the resonance frequencies as a function of pressure. It is shown that a pressure sensitivity of a few parts per million at one atmosphere can be achieved. Some comments are also made regarding an improved design of the device.
1054-6693
417-426
Andres, M.V.
97d552bc-e5e0-4069-86bd-c1971e30bd24
Foulds, K.W.H.
0c9d7eba-26fe-49a3-90cf-672dc3077bc0
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Andres, M.V.
97d552bc-e5e0-4069-86bd-c1971e30bd24
Foulds, K.W.H.
0c9d7eba-26fe-49a3-90cf-672dc3077bc0
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff

Andres, M.V., Foulds, K.W.H. and Tudor, M.J. (1988) Sensitivity and mode spectrum of a frequency-output silicon pressure sensor. Sensors and Actuators, 15 (4), 417-426. (doi:10.1016/0250-6874(88)81510-5).

Record type: Article

Abstract

The vibrational mode spectrum of a silicon vibrating pressure sensor is investigated. Particular attention is given to the analysis of the vibration shapes, quality factors and relative sensitivity of the resonance frequencies as a function of pressure. It is shown that a pressure sensitivity of a few parts per million at one atmosphere can be achieved. Some comments are also made regarding an improved design of the device.

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Published date: December 1988
Organisations: EEE

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Local EPrints ID: 256661
URI: https://eprints.soton.ac.uk/id/eprint/256661
ISSN: 1054-6693
PURE UUID: bfff1914-c8b3-492b-bcc5-430e189f46b7

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Date deposited: 11 Jul 2002
Last modified: 06 Dec 2017 17:31

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Contributors

Author: M.V. Andres
Author: K.W.H. Foulds
Author: M.J. Tudor

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