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Resonant beam pressure sensor fabricated with silicon fusion bonding

Petersen, K, Pourahmadi, F, Brown, J, Parsons, P, Skinner, M and Tudor, M (1991) Resonant beam pressure sensor fabricated with silicon fusion bonding

Record type: Conference or Workshop Item (Other)

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Published date: 1991
Additional Information: pp. 664-667
Organisations: EEE


Local EPrints ID: 256664
PURE UUID: 0c8e813d-e829-4a32-802d-9dc8b3f1df5d

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Date deposited: 11 Jul 2002
Last modified: 18 Jul 2017 09:44

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Author: K Petersen
Author: F Pourahmadi
Author: J Brown
Author: P Parsons
Author: M Skinner
Author: M Tudor

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