Resonant beam pressure sensor fabricated with silicon fusion bonding


Petersen, K, Pourahmadi, F, Brown, J, Parsons, P, Skinner, M and Tudor, M (1991) Resonant beam pressure sensor fabricated with silicon fusion bonding

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Item Type: Conference or Workshop Item (Other)
Additional Information: pp. 664-667
Organisations: EEE
ePrint ID: 256664
Date :
Date Event
1991Published
Date Deposited: 11 Jul 2002
Last Modified: 17 Apr 2017 23:01
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/256664

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