Petersen, K, Pourahmadi, F, Brown, J, Parsons, P, Skinner, M and Tudor, M (1991) Resonant beam pressure sensor fabricated with silicon fusion bonding.
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Published date: 1991
Additional Information:
pp. 664-667
Organisations:
EEE
Identifiers
Local EPrints ID: 256664
URI: http://eprints.soton.ac.uk/id/eprint/256664
PURE UUID: 0c8e813d-e829-4a32-802d-9dc8b3f1df5d
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Date deposited: 11 Jul 2002
Last modified: 11 Dec 2021 02:51
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Contributors
Author:
K Petersen
Author:
F Pourahmadi
Author:
J Brown
Author:
P Parsons
Author:
M Skinner
Author:
M Tudor
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