Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing


Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing Journal of Micromechanics and Microengineering, 12, pp. 1-6.

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Item Type: Article
ISSNs: 0960-1317 (print)
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257514
Date :
Date Event
2002Published
Date Deposited: 29 May 2003
Last Modified: 17 Apr 2017 22:50
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257514

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