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Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing

Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing Journal of Micromechanics and Microengineering, 12, pp. 1-6.

Record type: Article

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Published date: 2002
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 257514
URI: http://eprints.soton.ac.uk/id/eprint/257514
ISSN: 0960-1317
PURE UUID: cf94cdf2-6b07-4ed8-ac58-b833fe36cb89

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Date deposited: 29 May 2003
Last modified: 18 Jul 2017 09:38

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Contributors

Author: Y Su
Author: A G R Evans
Author: A Brunnschweiler
Author: G Ensell

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