Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning
Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning
27-30
Sehr, H
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Evans, A G R
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Ensell, G J
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Brunnschweiler, A
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Schabmueller, C J G
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2002
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c
Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G
(2002)
Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning.
Micromechanics Europe, Sinaia, Romania.
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Published date: 2002
Additional Information:
Event Dates: 6th-8th October 2002
Venue - Dates:
Micromechanics Europe, Sinaia, Romania, 2002-10-07
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 257589
URI: http://eprints.soton.ac.uk/id/eprint/257589
PURE UUID: 75c956e4-01bb-424a-8956-cfc730a4cf12
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Date deposited: 11 Jun 2003
Last modified: 10 Dec 2021 20:51
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Contributors
Author:
H Sehr
Author:
A G R Evans
Author:
G J Ensell
Author:
A Brunnschweiler
Author:
C J G Schabmueller
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