Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning


Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G (2002) Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning At Micromechanics Europe, Romania. , pp. 27-30.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: 6-8th October 2002
Venue - Dates: Micromechanics Europe, Romania, 2002-10-08
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257589
Date :
Date Event
2002Published
Date Deposited: 11 Jun 2003
Last Modified: 17 Apr 2017 22:50
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257589

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