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Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning

Record type: Conference or Workshop Item (Other)

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Citation

Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G (2002) Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning At Micromechanics Europe, Romania. , pp. 27-30.

More information

Published date: 2002
Additional Information: Event Dates: 6-8th October 2002
Venue - Dates: Micromechanics Europe, Romania, 2002-10-08
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257589
URI: http://eprints.soton.ac.uk/id/eprint/257589
PURE UUID: 75c956e4-01bb-424a-8956-cfc730a4cf12

Catalogue record

Date deposited: 11 Jun 2003
Last modified: 18 Jul 2017 09:38

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Contributors

Author: H Sehr
Author: A G R Evans
Author: G J Ensell
Author: A Brunnschweiler
Author: C J G Schabmueller

University divisions


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