Schabmueller, C J G, Evans, A G R, Ensell, G J, Brunnschweiler, A, Sehr, H and Bu, M
Towards an electrostatic closeable reaction chamber
At Micromechanics Europe, Romania.
Full text not available from this repository.
This paper focuses on the design and fabrication of a micro-reaction chamber working as an inegrated valve. The 1 ul chamber is designed to close electrostatically, thus sealing the chamber and preventng the reactants from evaporating. The size of the chip is 7.1mm x 1.5mm
Conference or Workshop Item
||Event Dates: 6-8th October 2002
|Venue - Dates:
||Micromechanics Europe, Romania, 2002-10-08
||Nanoelectronics and Nanotechnology
||26 Aug 2004
||17 Apr 2017 22:50
|Further Information:||Google Scholar|
Actions (login required)