Towards an electrostatic closeable reaction chamber

Schabmueller, C J G, Evans, A G R, Ensell, G J, Brunnschweiler, A, Sehr, H and Bu, M (2002) Towards an electrostatic closeable reaction chamber At Micromechanics Europe, Romania. , pp. 51-54.


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This paper focuses on the design and fabrication of a micro-reaction chamber working as an inegrated valve. The 1 ul chamber is designed to close electrostatically, thus sealing the chamber and preventng the reactants from evaporating. The size of the chip is 7.1mm x 1.5mm

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 6-8th October 2002
Venue - Dates: Micromechanics Europe, Romania, 2002-10-08
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257590
Date :
Date Event
Date Deposited: 26 Aug 2004
Last Modified: 17 Apr 2017 22:50
Further Information:Google Scholar

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