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Towards an electrostatic closeable reaction chamber

Schabmueller, C J G, Evans, A G R, Ensell, G J, Brunnschweiler, A, Sehr, H and Bu, M (2002) Towards an electrostatic closeable reaction chamber At Micromechanics Europe, Romania. , pp. 51-54.

Record type: Conference or Workshop Item (Paper)


This paper focuses on the design and fabrication of a micro-reaction chamber working as an inegrated valve. The 1 ul chamber is designed to close electrostatically, thus sealing the chamber and preventng the reactants from evaporating. The size of the chip is 7.1mm x 1.5mm

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Published date: 2002
Additional Information: Event Dates: 6-8th October 2002
Venue - Dates: Micromechanics Europe, Romania, 2002-10-08
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 257590
PURE UUID: d574bf82-1928-4787-875a-c3021cdf3695

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Date deposited: 26 Aug 2004
Last modified: 18 Jul 2017 09:38

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Author: C J G Schabmueller
Author: A G R Evans
Author: G J Ensell
Author: A Brunnschweiler
Author: H Sehr
Author: M Bu

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