Time constant and lateral resonances of thermal vertical bimorph actuators
Time constant and lateral resonances of thermal vertical bimorph actuators
410-413
Sehr, H
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Tomlin, I S
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Huang, B
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Beeby, S P
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Evans, A G R
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Brunnschweiler, A
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Ensell, G J
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Schabmueller, C J G
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Niblock, T E G
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2002
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Tomlin, I S
564917fc-0f0c-4e7c-aaef-83d72c097439
Huang, B
dbc73278-0b9b-4142-b816-4a8ca4d527cd
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Evans, A G R
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Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c
Niblock, T E G
8baf7341-f898-43d9-877d-ebf37d231082
Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G
(2002)
Time constant and lateral resonances of thermal vertical bimorph actuators.
Journal of Micromechanics and Microengineering, 12 (4), .
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More information
Published date: 2002
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 257593
URI: http://eprints.soton.ac.uk/id/eprint/257593
ISSN: 0960-1317
PURE UUID: c89de2d6-b0ea-4c89-b479-98bd0afcfb31
Catalogue record
Date deposited: 11 Jun 2003
Last modified: 09 Jan 2022 02:45
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Contributors
Author:
H Sehr
Author:
I S Tomlin
Author:
B Huang
Author:
S P Beeby
Author:
A G R Evans
Author:
A Brunnschweiler
Author:
G J Ensell
Author:
C J G Schabmueller
Author:
T E G Niblock
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