Time constant and lateral resonances of thermal vertical bimorph actuators


Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G (2002) Time constant and lateral resonances of thermal vertical bimorph actuators Journal of Micromechanics and Microengineering, 12, (4), pp. 410-413.

Download

Full text not available from this repository.

Item Type: Article
ISSNs: 0960-1317 (print)
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 257593
Date :
Date Event
2002Published
Date Deposited: 11 Jun 2003
Last Modified: 17 Apr 2017 22:50
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257593

Actions (login required)

View Item View Item