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Time constant and lateral resonances of thermal vertical bimorph actuators

Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G (2002) Time constant and lateral resonances of thermal vertical bimorph actuators Journal of Micromechanics and Microengineering, 12, (4), pp. 410-413.

Record type: Article

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Published date: 2002
Organisations: Nanoelectronics and Nanotechnology, EEE


Local EPrints ID: 257593
ISSN: 0960-1317
PURE UUID: c89de2d6-b0ea-4c89-b479-98bd0afcfb31
ORCID for S P Beeby: ORCID iD

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Date deposited: 11 Jun 2003
Last modified: 18 Jul 2017 09:38

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Author: H Sehr
Author: I S Tomlin
Author: B Huang
Author: S P Beeby ORCID iD
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell
Author: C J G Schabmueller
Author: T E G Niblock

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