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Time constant and lateral resonances of thermal vertical bimorph actuators

Time constant and lateral resonances of thermal vertical bimorph actuators
Time constant and lateral resonances of thermal vertical bimorph actuators
0960-1317
410-413
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Tomlin, I S
564917fc-0f0c-4e7c-aaef-83d72c097439
Huang, B
dbc73278-0b9b-4142-b816-4a8ca4d527cd
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c
Niblock, T E G
8baf7341-f898-43d9-877d-ebf37d231082
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Tomlin, I S
564917fc-0f0c-4e7c-aaef-83d72c097439
Huang, B
dbc73278-0b9b-4142-b816-4a8ca4d527cd
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c
Niblock, T E G
8baf7341-f898-43d9-877d-ebf37d231082

Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G (2002) Time constant and lateral resonances of thermal vertical bimorph actuators. Journal of Micromechanics and Microengineering, 12 (4), 410-413.

Record type: Article

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More information

Published date: 2002
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 257593
URI: http://eprints.soton.ac.uk/id/eprint/257593
ISSN: 0960-1317
PURE UUID: c89de2d6-b0ea-4c89-b479-98bd0afcfb31
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 11 Jun 2003
Last modified: 09 Jan 2022 02:45

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Contributors

Author: H Sehr
Author: I S Tomlin
Author: B Huang
Author: S P Beeby ORCID iD
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell
Author: C J G Schabmueller
Author: T E G Niblock

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