Jiang, X, Wang, F, Kraft, Michael and Boser, B E (2002) An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. Digest of Solid State Sensor and Actuator Workshop, Hilton Head Island of America, United States. pp. 202-205 .
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Conference or Workshop Item
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Published date: 2002
Additional Information:
Event Dates: June 2002
Venue - Dates:
Digest of Solid State Sensor and Actuator Workshop, Hilton Head Island of America, United States, 2002-05-31
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 257815
URI: http://eprints.soton.ac.uk/id/eprint/257815
PURE UUID: 893839c4-23b3-46ee-9d6f-99bcb56ca224
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Date deposited: 26 Jun 2003
Last modified: 08 Jan 2022 02:40
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Contributors
Author:
X Jiang
Author:
F Wang
Author:
Michael Kraft
Author:
B E Boser
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