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An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.

Record type: Conference or Workshop Item (Other)

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Citation

Jiang, X, Wang, F, Kraft, Michael and Boser, B E (2002) An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. At Digest of Solid State Sensor and Actuator Workshop, United States. , pp. 202-205.

More information

Published date: 2002
Additional Information: Event Dates: June 2002
Venue - Dates: Digest of Solid State Sensor and Actuator Workshop, United States, 2002-06-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257815
URI: http://eprints.soton.ac.uk/id/eprint/257815
PURE UUID: 893839c4-23b3-46ee-9d6f-99bcb56ca224

Catalogue record

Date deposited: 26 Jun 2003
Last modified: 18 Jul 2017 09:36

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Contributors

Author: X Jiang
Author: F Wang
Author: Michael Kraft
Author: B E Boser

University divisions

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