An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.


Jiang, X, Wang, F, Kraft, Michael and Boser, B E (2002) An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. At Digest of Solid State Sensor and Actuator Workshop, United States. , pp. 202-205.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: June 2002
Venue - Dates: Digest of Solid State Sensor and Actuator Workshop, United States, 2002-06-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257815
Date :
Date Event
2002Published
Date Deposited: 26 Jun 2003
Last Modified: 17 Apr 2017 22:48
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257815

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