The University of Southampton
University of Southampton Institutional Repository

Electroplating moulds with different thick photoresists for MEMS applications.

Kukharenka, A and Kraft, Michael (2002) Electroplating moulds with different thick photoresists for MEMS applications. At Eurosensors XVI. , pp. 103-104.

Record type: Conference or Workshop Item (Paper)

Full text not available from this repository.

More information

Published date: 2002
Additional Information: Event Dates: September 2002
Venue - Dates: Eurosensors XVI, 2002-09-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257819
URI: http://eprints.soton.ac.uk/id/eprint/257819
PURE UUID: 464a1428-b38a-4226-83e8-b98fb3f81ec4

Catalogue record

Date deposited: 27 Oct 2004
Last modified: 18 Jul 2017 09:35

Export record

Contributors

Author: A Kukharenka
Author: Michael Kraft

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×