Kukharenka, A and Kraft, Michael
Realisation of electroplating moulds with different thick photoresists for MEMs applications.
At 4th International Conference on Material for Microelectronics and Nanoengineering, Finland.
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Conference or Workshop Item
||Event Dates: June 2002
|Venue - Dates:
||4th International Conference on Material for Microelectronics and Nanoengineering, Finland, 2002-06-01
||Nanoelectronics and Nanotechnology
||27 Oct 2004
||17 Apr 2017 22:48
|Further Information:||Google Scholar|
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