Realisation of electroplating moulds with different thick photoresists for MEMs applications.


Kukharenka, A and Kraft, Michael (2002) Realisation of electroplating moulds with different thick photoresists for MEMs applications. At 4th International Conference on Material for Microelectronics and Nanoengineering, Finland. , pp. 165-168.

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Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: June 2002
Venue - Dates: 4th International Conference on Material for Microelectronics and Nanoengineering, Finland, 2002-06-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257820
Date :
Date Event
2002Published
Date Deposited: 27 Oct 2004
Last Modified: 17 Apr 2017 22:48
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257820

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