Gaura, E and Kraft, Michael (2002) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings of 5th Conference on Modelling and Simulation of Microsystems, Puerto Rico. pp. 154-157 .
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Published date: 2002
Additional Information:
Event Dates: April 2002
Venue - Dates:
Proceedings of 5th Conference on Modelling and Simulation of Microsystems, Puerto Rico, 2002-03-31
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 257821
URI: http://eprints.soton.ac.uk/id/eprint/257821
PURE UUID: 9ae8454c-3611-4eda-a36e-3ab72d432d50
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Date deposited: 26 Jun 2003
Last modified: 07 Jan 2022 21:10
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Contributors
Author:
E Gaura
Author:
Michael Kraft
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