Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.


Gaura, E and Kraft, Michael (2002) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. At Proceedings of 5th Conference on Modelling and Simulation of Microsystems. , pp. 154-157.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: April 2002
Venue - Dates: Proceedings of 5th Conference on Modelling and Simulation of Microsystems, 2002-04-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 257821
Date :
Date Event
2002Published
Date Deposited: 26 Jun 2003
Last Modified: 17 Apr 2017 22:48
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257821

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