Houlihan, Ruth, Kukarenka, A, Gindila, M and Kraft, Michael (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland. pp. 305-308 .
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Published date: 2001
Additional Information:
Event Dates: 2001
Venue - Dates:
Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland, 2001-01-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 257822
URI: http://eprints.soton.ac.uk/id/eprint/257822
PURE UUID: 39b6f305-300f-41c4-bb5e-c76ae83ff3b5
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Date deposited: 26 Jun 2003
Last modified: 10 Dec 2021 20:53
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Contributors
Author:
Ruth Houlihan
Author:
A Kukarenka
Author:
M Gindila
Author:
Michael Kraft
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