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Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.

Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
305-308
Houlihan, Ruth
e35f2045-2362-427c-aeb3-471c55aa5a26
Kukarenka, A
dfcbdd58-c474-41a9-96fc-ae4793434015
Gindila, M
e8778718-774f-43fb-b6d3-4c1696643102
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Houlihan, Ruth
e35f2045-2362-427c-aeb3-471c55aa5a26
Kukarenka, A
dfcbdd58-c474-41a9-96fc-ae4793434015
Gindila, M
e8778718-774f-43fb-b6d3-4c1696643102
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e

Houlihan, Ruth, Kukarenka, A, Gindila, M and Kraft, Michael (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland. pp. 305-308 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: 2001
Additional Information: Event Dates: 2001
Venue - Dates: Proceedings SPIE Conference on Micromechanics Europe, Cork, Ireland, 2001-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257822
URI: http://eprints.soton.ac.uk/id/eprint/257822
PURE UUID: 39b6f305-300f-41c4-bb5e-c76ae83ff3b5

Catalogue record

Date deposited: 26 Jun 2003
Last modified: 10 Dec 2021 20:53

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Contributors

Author: Ruth Houlihan
Author: A Kukarenka
Author: M Gindila
Author: Michael Kraft

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