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Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.

Houlihan, Ruth, Kukarenka, A, Gindila, M and Kraft, Michael (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. At Proceedings SPIE Conference on Micromechanics Europe. , pp. 305-308.

Record type: Conference or Workshop Item (Other)

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Published date: 2001
Additional Information: Event Dates: 2001
Venue - Dates: Proceedings SPIE Conference on Micromechanics Europe, 2001-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257822
URI: http://eprints.soton.ac.uk/id/eprint/257822
PURE UUID: 39b6f305-300f-41c4-bb5e-c76ae83ff3b5

Catalogue record

Date deposited: 26 Jun 2003
Last modified: 18 Jul 2017 09:35

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Contributors

Author: Ruth Houlihan
Author: A Kukarenka
Author: M Gindila
Author: Michael Kraft

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