A silicon microfluidic ultrasonic separator
A silicon microfluidic ultrasonic separator
Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, fabrication and control of the device are discussed.
microfluidic, microengineering, ultrasonic
425-434
Harris, N.R.
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Hill, M.
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Beeby, S.
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Shen, Y.
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White, N.M.
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Hawkes, J.J.
bb38311c-53e6-417c-ae1a-97dd07c5830b
Coakley, W.T.
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2003
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
Shen, Y.
b7aa33ab-b778-4454-a00c-f40c4ca46539
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Hawkes, J.J.
bb38311c-53e6-417c-ae1a-97dd07c5830b
Coakley, W.T.
f5441e03-d838-46e0-8337-aaeb8886cb71
Harris, N.R., Hill, M., Beeby, S., Shen, Y., White, N.M., Hawkes, J.J. and Coakley, W.T.
(2003)
A silicon microfluidic ultrasonic separator.
Sensors and Actuators B: Chemical, 95 (1-3), .
(doi:10.1016/S0925-4005(03)00448-9).
Abstract
Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, fabrication and control of the device are discussed.
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Published date: 2003
Keywords:
microfluidic, microengineering, ultrasonic
Organisations:
Mechatronics, EEE
Identifiers
Local EPrints ID: 258393
URI: http://eprints.soton.ac.uk/id/eprint/258393
ISSN: 0925-4005
PURE UUID: 757dbbc8-768a-43cc-94f9-68f370cdf772
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Date deposited: 24 Oct 2003
Last modified: 07 Dec 2024 02:35
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Contributors
Author:
N.R. Harris
Author:
S. Beeby
Author:
Y. Shen
Author:
N.M. White
Author:
J.J. Hawkes
Author:
W.T. Coakley
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