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A silicon microfluidic ultrasonic separator

Harris, N.R., Hill, M., Beeby, S., Shen, Y., White, N.M., Hawkes, J.J. and Coakley, W.T. (2003) A silicon microfluidic ultrasonic separator Sensors and Actuators B: Chemical, 95, (1-3), pp. 425-434. (doi:10.1016/S0925-4005(03)00448-9).

Record type: Article

Abstract

Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, fabrication and control of the device are discussed.

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Published date: 2003
Keywords: microfluidic, microengineering, ultrasonic
Organisations: Mechatronics, EEE

Identifiers

Local EPrints ID: 258393
URI: http://eprints.soton.ac.uk/id/eprint/258393
ISSN: 0925-4005
PURE UUID: 757dbbc8-768a-43cc-94f9-68f370cdf772
ORCID for N.R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 24 Oct 2003
Last modified: 18 Jul 2017 09:32

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Contributors

Author: N.R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: S. Beeby ORCID iD
Author: Y. Shen
Author: N.M. White ORCID iD
Author: J.J. Hawkes
Author: W.T. Coakley

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