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A silicon microfluidic ultrasonic separator

Harris, N.R., Hill, M., Beeby, S., Shen, Y., White, N.M., Hawkes, J.J. and Coakley, W.T. (2003) A silicon microfluidic ultrasonic separator Sensors and Actuators B: Chemical, 95, (1-3), pp. 425-434. (doi:10.1016/S0925-4005(03)00448-9).

Record type: Article


Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes such a device providing filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyrex, and hence is highly compatible with established microfabrication techniques. The modelling, design, fabrication and control of the device are discussed.

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Published date: 2003
Keywords: microfluidic, microengineering, ultrasonic
Organisations: Mechatronics, EEE


Local EPrints ID: 258393
ISSN: 0925-4005
PURE UUID: 757dbbc8-768a-43cc-94f9-68f370cdf772
ORCID for N.R. Harris: ORCID iD
ORCID for M. Hill: ORCID iD
ORCID for S. Beeby: ORCID iD
ORCID for N.M. White: ORCID iD

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Date deposited: 24 Oct 2003
Last modified: 18 Jul 2017 09:32

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Author: N.R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: S. Beeby ORCID iD
Author: Y. Shen
Author: N.M. White ORCID iD
Author: J.J. Hawkes
Author: W.T. Coakley

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