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Advanced control systems for MEMS capacitive sensing accelerometers

Advanced control systems for MEMS capacitive sensing accelerometers
Advanced control systems for MEMS capacitive sensing accelerometers
This paper presents the use of a multi stage noise shaping (MASH) architecture to enhance the performance of closed loop capacitive inertial sensors which employ sigma-delta modulation as their method of force balancing. By means of simulation it has been shown that the performance of the accelerometer can be improved by as much as 20dB. The approach has been applied to a lateral bulk mocromachined accelerometer and results show a significant noise reduction in the baseband of the system, resulting in an improvement in the overall performance of the sensor.
Capacitive sensing accelerometers, sigma-delta modulation and multi stage noise shaping (MASH)
90-808266-1-8
231-234
Mokhtari, M
3c68fe0c-2c73-4e2a-9897-590e244642bd
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Mokhtari, M
3c68fe0c-2c73-4e2a-9897-590e244642bd
Kraft, M
54927621-738f-4d40-af56-a027f686b59f

Mokhtari, M and Kraft, M (2003) Advanced control systems for MEMS capacitive sensing accelerometers. 14th Micromechanics Europe Workshop, Delft, The, Netherlands. 02 - 04 Nov 2003. pp. 231-234 .

Record type: Conference or Workshop Item (Poster)

Abstract

This paper presents the use of a multi stage noise shaping (MASH) architecture to enhance the performance of closed loop capacitive inertial sensors which employ sigma-delta modulation as their method of force balancing. By means of simulation it has been shown that the performance of the accelerometer can be improved by as much as 20dB. The approach has been applied to a lateral bulk mocromachined accelerometer and results show a significant noise reduction in the baseband of the system, resulting in an improvement in the overall performance of the sensor.

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More information

Published date: 2003
Additional Information: Event Dates: 2-4th November 2003
Venue - Dates: 14th Micromechanics Europe Workshop, Delft, The, Netherlands, 2003-11-02 - 2003-11-04
Keywords: Capacitive sensing accelerometers, sigma-delta modulation and multi stage noise shaping (MASH)
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 258600
URI: http://eprints.soton.ac.uk/id/eprint/258600
ISBN: 90-808266-1-8
PURE UUID: bf27dbf1-14f6-4a64-b41a-5951f96e65e1

Catalogue record

Date deposited: 24 Nov 2003
Last modified: 29 Jan 2020 15:32

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Contributors

Author: M Mokhtari
Author: M Kraft

University divisions

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