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TEM study of solid phase epitaxial growth behaviour of normal and angled Si implanted gate stack structure

TEM study of solid phase epitaxial growth behaviour of normal and angled Si implanted gate stack structure
TEM study of solid phase epitaxial growth behaviour of normal and angled Si implanted gate stack structure
Wang, Y
adc6c787-e577-46bf-bda7-740d56e7d554
Waite, A
01666e1d-ef61-4f3a-938f-722c5b7fdef9
Cerrina, C
80f30b6e-cc82-427a-a84b-817f660d112f
Hemment, P L F
94618b9c-dba6-4cf6-b4d9-8770e7081532
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Wang, Y
adc6c787-e577-46bf-bda7-740d56e7d554
Waite, A
01666e1d-ef61-4f3a-938f-722c5b7fdef9
Cerrina, C
80f30b6e-cc82-427a-a84b-817f660d112f
Hemment, P L F
94618b9c-dba6-4cf6-b4d9-8770e7081532
Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Wang, Y, Waite, A, Cerrina, C, Hemment, P L F, Ashburn, P and Evans, A G R (2003) TEM study of solid phase epitaxial growth behaviour of normal and angled Si implanted gate stack structure. Microscopy of Semiconducting Materials Conference, Cambridge. 30 Mar - 02 Apr 2003.

Record type: Conference or Workshop Item (Poster)

Full text not available from this repository.

More information

Published date: 2003
Additional Information: Event Dates: 31 March - 3 April
Venue - Dates: Microscopy of Semiconducting Materials Conference, Cambridge, 2003-03-30 - 2003-04-02
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 258715
URI: http://eprints.soton.ac.uk/id/eprint/258715
PURE UUID: cb7be98a-1eba-4f37-9b94-45a26808cce3

Catalogue record

Date deposited: 05 Mar 2004
Last modified: 29 Jan 2020 15:33

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