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Micromachined Diaphragms with Integrated Actuation Coils

Micromachined Diaphragms with Integrated Actuation Coils
Micromachined Diaphragms with Integrated Actuation Coils
This paper presents a process for fabricating diaphragms, suitable for use in micromachined pumps within the field of micro-fluidics. To enable the actuation of a thick-film deposited magnetostrictive material, actuation coils are fabricated onto the non-chamber face of the diaphragms. These actuation coils are fabricated using a multilayer deposition approach compatible with micromachining processes. The selection of diaphragm and actuation region dimensions has been achieved through the use of finite element modeling. The paper also describes the fabrication process used to realize the structures.
698-699
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Grabham, Neil, Beeby, Steve and White, Neil (2003) Micromachined Diaphragms with Integrated Actuation Coils. At EUROSENSORS XVII EUROSENSORS XVII, Portugal. pp. 698-699.

Record type: Conference or Workshop Item (Paper)

Abstract

This paper presents a process for fabricating diaphragms, suitable for use in micromachined pumps within the field of micro-fluidics. To enable the actuation of a thick-film deposited magnetostrictive material, actuation coils are fabricated onto the non-chamber face of the diaphragms. These actuation coils are fabricated using a multilayer deposition approach compatible with micromachining processes. The selection of diaphragm and actuation region dimensions has been achieved through the use of finite element modeling. The paper also describes the fabrication process used to realize the structures.

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More information

Published date: 2003
Additional Information: Event Dates: September 2003
Venue - Dates: EUROSENSORS XVII, Portugal, 2003-09-01
Organisations: EEE

Identifiers

Local EPrints ID: 258886
URI: https://eprints.soton.ac.uk/id/eprint/258886
PURE UUID: 2ded0187-6519-46c1-b07d-a92a329b2326
ORCID for Neil Grabham: ORCID iD orcid.org/0000-0002-6385-0331
ORCID for Steve Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 25 Feb 2004
Last modified: 06 Jun 2018 13:12

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