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Etching techniques for the realisation of optical micro-cavities on silicon for atom traps.

Etching techniques for the realisation of optical micro-cavities on silicon for atom traps.
Etching techniques for the realisation of optical micro-cavities on silicon for atom traps.
S82-S85
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kukharenka, Alena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Bagnall, Darren
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Jones, M
7ffd3f08-1eaa-4386-b4fa-445a22c085b7
Powell, M
04167678-a17f-46a5-b2aa-f427142b3afc
Hinds, E
19eecd8c-a0b1-4856-939b-e21cbe3060c6
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kukharenka, Alena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Bagnall, Darren
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Jones, M
7ffd3f08-1eaa-4386-b4fa-445a22c085b7
Powell, M
04167678-a17f-46a5-b2aa-f427142b3afc
Hinds, E
19eecd8c-a0b1-4856-939b-e21cbe3060c6

Moktadir, Zak, Kukharenka, Alena, Kraft, Michael, Bagnall, Darren, Jones, M, Powell, M and Hinds, E (2004) Etching techniques for the realisation of optical micro-cavities on silicon for atom traps. Journal of Miromechanical Microengineering, 14 (9), S82-S85.

Record type: Article

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More information

Published date: 2004
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 259076
URI: http://eprints.soton.ac.uk/id/eprint/259076
PURE UUID: e0aadbfa-3719-4ea8-89d8-e01ab45cf25e

Catalogue record

Date deposited: 27 Oct 2004
Last modified: 24 Jun 2020 16:31

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