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Etching techniques for the realisation of optical micro-cavities on silicon for atom traps.

Record type: Article

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Citation

Moktadir, Zak, Kukharenka, Alena, Kraft, Michael, Bagnall, Darren, Jones, M, Powell, M and Hinds, E (2004) Etching techniques for the realisation of optical micro-cavities on silicon for atom traps. Journal of Miromechanical Microengineering, 14, (9), S82-S85.

More information

Published date: 2004
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 259076
URI: http://eprints.soton.ac.uk/id/eprint/259076
PURE UUID: e0aadbfa-3719-4ea8-89d8-e01ab45cf25e

Catalogue record

Date deposited: 27 Oct 2004
Last modified: 18 Jul 2017 09:26

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Contributors

Author: Zak Moktadir
Author: Alena Kukharenka
Author: Michael Kraft
Author: Darren Bagnall
Author: M Jones
Author: M Powell
Author: E Hinds

University divisions


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