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Advanced Control Systems for MEMS capacitive sensing accelerometers

Mokthari, M E and Kraft, Michael (2004) Advanced Control Systems for MEMS capacitive sensing accelerometers, Micromechanical Microengineering

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Published date: 2004
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 259078
PURE UUID: a757514f-5967-45e0-b4a1-43d492e8dc18

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Date deposited: 27 Sep 2004
Last modified: 18 Jul 2017 09:26

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Author: M E Mokthari
Author: Michael Kraft

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