Advanced Control Systems for MEMS capacitive sensing accelerometers


Mokthari, M E and Kraft, Michael (2004) Advanced Control Systems for MEMS capacitive sensing accelerometers, Micromechanical Microengineering

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Item Type: Book
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 259078
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Date Event
2004Published
Date Deposited: 27 Sep 2004
Last Modified: 17 Apr 2017 22:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259078

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