Kukharenka, E, Kraft, M and Hollinshead, N (2004) Realisation of electroplating moulds with different thick photoresists for MEMS applications. Eurosensors XIV Conference, Prague, Czech Republic. 15 - 18 Sep 2002. pp. 103-104 .
Record type:
Conference or Workshop Item
(Poster)
More information
Published date: 2004
Additional Information:
Event Dates: September 15-18, 2002
Venue - Dates:
Eurosensors XIV Conference, Prague, Czech Republic, 2002-09-15 - 2002-09-18
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 259080
URI: http://eprints.soton.ac.uk/id/eprint/259080
PURE UUID: 5c5a682d-c405-4f48-bd64-2ae84ff58a72
Catalogue record
Date deposited: 22 Oct 2004
Last modified: 14 Mar 2024 06:18
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Contributors
Author:
E Kukharenka
Author:
M Kraft
Author:
N Hollinshead
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