Realisation of electroplating moulds with different thick photoresists for MEMS applications


Kukharenka, E, Kraft, M and Hollinshead, N (2004) Realisation of electroplating moulds with different thick photoresists for MEMS applications At Eurosensors XIV Conference, Czech Republic. 15 - 18 Sep 2002. , pp. 103-104.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: September 15-18, 2002
Venue - Dates: Eurosensors XIV Conference, Czech Republic, 2002-09-15 - 2002-09-18
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 259080
Date :
Date Event
2004Published
Date Deposited: 22 Oct 2004
Last Modified: 17 Apr 2017 22:33
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259080

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