Thick-film PZT-metallic triple beam resonator

Yan, T, Jones, B E, Rakowski, R T, Beeby, S P, Tudor, M J and White, N M (2003) Thick-film PZT-metallic triple beam resonator. Electronics Letters, 39 (13), 982-983.

Record type: Article

Abstract

A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5mm long and 7mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.

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Published date: June 2003

Keywords: metallic resonators, thick-film piezoelectrics, Remise

Organisations: EEE

Identifiers

Local EPrints ID: 259269

URI: http://eprints.soton.ac.uk/id/eprint/259269

ISSN: 0013-5194

PURE UUID: 86eb6ff0-5ef7-497e-9e5d-85ad16079e26

ORCID for S P Beeby:

orcid.org/0000-0002-0800-1759

ORCID for M J Tudor:

orcid.org/0000-0003-1179-9455

ORCID for N M White:

orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Apr 2004

Last modified: 15 Mar 2024 02:46

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Contributors

Author: T Yan

Author: B E Jones

Author: R T Rakowski

Author: S P Beeby

Author: M J Tudor

Author: N M White

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