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Thick-film PZT-metallic triple beam resonator

Thick-film PZT-metallic triple beam resonator
Thick-film PZT-metallic triple beam resonator
A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5mm long and 7mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.
metallic resonators, thick-film piezoelectrics, Remise
0013-5194
982-983
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B E
cf501aef-d955-461d-9c2f-ee5b04400346
Rakowski, R T
3c6c4f33-5940-411c-8dac-46a9c0fd6fb4
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B E
cf501aef-d955-461d-9c2f-ee5b04400346
Rakowski, R T
3c6c4f33-5940-411c-8dac-46a9c0fd6fb4
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Yan, T, Jones, B E, Rakowski, R T, Beeby, S P, Tudor, M J and White, N M (2003) Thick-film PZT-metallic triple beam resonator. Electronics Letters, 39 (13), 982-983.

Record type: Article

Abstract

A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5mm long and 7mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.

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More information

Published date: June 2003
Keywords: metallic resonators, thick-film piezoelectrics, Remise
Organisations: EEE

Identifiers

Local EPrints ID: 259269
URI: https://eprints.soton.ac.uk/id/eprint/259269
ISSN: 0013-5194
PURE UUID: 86eb6ff0-5ef7-497e-9e5d-85ad16079e26
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Apr 2004
Last modified: 06 Jun 2018 13:12

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