Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms
Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms
A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.
0 7503 0978 4
77-82
Institute of Physics Publishing
Yan, T.
4546e78c-08f3-44e6-8522-a5e29317e641
Jones, B.
6697cd78-4d2c-4ecf-8e91-f2c82e249090
Rakowski, R.
106a7051-99de-46e6-bf2a-f9b33da4e6a6
Tudor, M.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
1 September 2003
Yan, T.
4546e78c-08f3-44e6-8522-a5e29317e641
Jones, B.
6697cd78-4d2c-4ecf-8e91-f2c82e249090
Rakowski, R.
106a7051-99de-46e6-bf2a-f9b33da4e6a6
Tudor, M.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Yan, T., Jones, B., Rakowski, R., Tudor, M., Beeby, S. and White, N.
(2003)
Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms.
In,
Prosser, S.J. and Lewis, E.
(eds.)
Sensors and Their Applications XII.
(Series in Sensors)
Sensors and their Applications (01/09/03 - 03/09/03)
Bristol, GB.
Institute of Physics Publishing, .
Record type:
Book Section
Abstract
A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.
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Published date: 1 September 2003
Venue - Dates:
Sensors and their Applications, , Limerick, Ireland, 2003-09-01 - 2003-09-03
Organisations:
EEE
Identifiers
Local EPrints ID: 259271
URI: http://eprints.soton.ac.uk/id/eprint/259271
ISBN: 0 7503 0978 4
PURE UUID: 966fad12-cd64-466e-b4e5-ce2faae85ea1
Catalogue record
Date deposited: 20 Apr 2004
Last modified: 13 Dec 2021 02:38
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Contributors
Author:
T. Yan
Author:
B. Jones
Author:
R. Rakowski
Author:
M. Tudor
Author:
S. Beeby
Author:
N. White
Editor:
S.J. Prosser
Editor:
E. Lewis
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