The University of Southampton
University of Southampton Institutional Repository

Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms

Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms
Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms
A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.
0 7503 0978 4
77-82
Institute of Physics Publishing
Yan, T.
4546e78c-08f3-44e6-8522-a5e29317e641
Jones, B.
6697cd78-4d2c-4ecf-8e91-f2c82e249090
Rakowski, R.
106a7051-99de-46e6-bf2a-f9b33da4e6a6
Tudor, M.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Prosser, S.J.
Lewis, E.
Yan, T.
4546e78c-08f3-44e6-8522-a5e29317e641
Jones, B.
6697cd78-4d2c-4ecf-8e91-f2c82e249090
Rakowski, R.
106a7051-99de-46e6-bf2a-f9b33da4e6a6
Tudor, M.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Prosser, S.J.
Lewis, E.

Yan, T., Jones, B., Rakowski, R., Tudor, M., Beeby, S. and White, N. (2003) Metallic triple-beam resonant force sensor with thick-film printed piezoelectric vibration excitation and detection mechanisms. In, Prosser, S.J. and Lewis, E. (eds.) Sensors and Their Applications XII. (Series in Sensors) Sensors and their Applications (04/09/03) Bristol, GB. Institute of Physics Publishing, pp. 77-82.

Record type: Book Section

Abstract

A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.

Full text not available from this repository.

More information

Published date: 1 September 2003
Venue - Dates: Sensors and their Applications, Limerick, Ireland, 2003-09-02 - 2003-09-04
Organisations: EEE

Identifiers

Local EPrints ID: 259271
URI: https://eprints.soton.ac.uk/id/eprint/259271
ISBN: 0 7503 0978 4
PURE UUID: 966fad12-cd64-466e-b4e5-ce2faae85ea1
ORCID for S. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Apr 2004
Last modified: 14 Mar 2019 01:54

Export record

Contributors

Author: T. Yan
Author: B. Jones
Author: R. Rakowski
Author: M. Tudor
Author: S. Beeby ORCID iD
Author: N. White ORCID iD
Editor: S.J. Prosser
Editor: E. Lewis

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×