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Metallic Triple-beam Resonant Force Sensor with Thick-film Printed Piezoelectric Vibration Excitation and Detection Mechanisms

Metallic Triple-beam Resonant Force Sensor with Thick-film Printed Piezoelectric Vibration Excitation and Detection Mechanisms
Metallic Triple-beam Resonant Force Sensor with Thick-film Printed Piezoelectric Vibration Excitation and Detection Mechanisms
A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.
0 7503 0978 4
77-82
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B E
cf501aef-d955-461d-9c2f-ee5b04400346
Rakowski, R T
3c6c4f33-5940-411c-8dac-46a9c0fd6fb4
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Prosser, S J
8955fb40-1364-4447-87fc-e00774c61270
Lewis, E
1592780d-fbc1-45bb-a8d5-602f1fa06124
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B E
cf501aef-d955-461d-9c2f-ee5b04400346
Rakowski, R T
3c6c4f33-5940-411c-8dac-46a9c0fd6fb4
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Prosser, S J
8955fb40-1364-4447-87fc-e00774c61270
Lewis, E
1592780d-fbc1-45bb-a8d5-602f1fa06124

Yan, T, Jones, B E, Rakowski, R T, Tudor, M J, Beeby, S P and White, N M (2003) Metallic Triple-beam Resonant Force Sensor with Thick-film Printed Piezoelectric Vibration Excitation and Detection Mechanisms. Prosser, S J and Lewis, E (eds.) At Sensors and their Applications Sensors and their Applications. 02 - 04 Sep 2003. pp. 77-82.

Record type: Conference or Workshop Item (Other)

Abstract

A metallic resonant force sensor consisting of a triple beam tuning fork structure with thick film piezoelectric elements to excite and detect the vibrations is presented. The resonating element of the sensor was fabricated in 430S17 stainless steel with a length of 15.5 mm and width of 7 mm. The resonator has an operational resonance frequency at 6.9 kHz under 15 N pretension. The pretensioned sensor was further loaded up to about 50 N, exhibiting a sensitivity of 13.0 Hz/N and a Q-factor greater than 1400 in air. The fabrication of the device involves combination of a photochemical etching technique and a standard screen-printing process which allows mass production of the device at low costs.

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More information

Published date: 2003
Additional Information: Event Dates: 2nd-4th September 2003
Venue - Dates: Sensors and their Applications, 2003-09-02 - 2003-09-04
Organisations: EEE

Identifiers

Local EPrints ID: 259271
URI: https://eprints.soton.ac.uk/id/eprint/259271
ISBN: 0 7503 0978 4
PURE UUID: 966fad12-cd64-466e-b4e5-ce2faae85ea1
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Apr 2004
Last modified: 06 Jun 2018 13:12

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