Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup
Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a simultaneous, double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The combination of these two batch-fabrication processes provides the opportunity for mass production of the device at low cost. The resonator, a dynamically balanced triple beam tuning fork (TBTF) structure 23.5 mm long and 6.5 mm wide, has a favoured mode at 4.96 kHz with a Q-factor of 3630 operating in air.
10-13
Yan, T
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Jones, B
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Rakowski, R
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Tudor, M
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Beeby, S
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White, N
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2003
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B
3c7d1997-4778-43b1-bfc7-2890dddd49fd
Rakowski, R
b9144fb2-6ae8-44b9-a2af-126764a9a1a8
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Yan, T, Jones, B, Rakowski, R, Tudor, M, Beeby, S and White, N
(2003)
Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup.
The 17th European Conference on Solid State Transducers (Eurosensors XVII), , Guimaraes, Portugal.
.
Record type:
Conference or Workshop Item
(Other)
Abstract
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a simultaneous, double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The combination of these two batch-fabrication processes provides the opportunity for mass production of the device at low cost. The resonator, a dynamically balanced triple beam tuning fork (TBTF) structure 23.5 mm long and 6.5 mm wide, has a favoured mode at 4.96 kHz with a Q-factor of 3630 operating in air.
Text
M2A2_-_Eurosensors_2003,_Portugal.pdf
- Other
More information
Published date: 2003
Venue - Dates:
The 17th European Conference on Solid State Transducers (Eurosensors XVII), , Guimaraes, Portugal, 2003-09-24
Organisations:
Electronics & Computer Science
Identifiers
Local EPrints ID: 259272
URI: http://eprints.soton.ac.uk/id/eprint/259272
PURE UUID: d933ab15-a210-4d07-8cd7-743af570bba7
Catalogue record
Date deposited: 20 Apr 2004
Last modified: 15 Mar 2024 02:46
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Contributors
Author:
T Yan
Author:
B Jones
Author:
R Rakowski
Author:
M Tudor
Author:
S Beeby
Author:
N White
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