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Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup

Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup
Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a simultaneous, double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The combination of these two batch-fabrication processes provides the opportunity for mass production of the device at low cost. The resonator, a dynamically balanced triple beam tuning fork (TBTF) structure 23.5 mm long and 6.5 mm wide, has a favoured mode at 4.96 kHz with a Q-factor of 3630 operating in air.
10-13
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B
3c7d1997-4778-43b1-bfc7-2890dddd49fd
Rakowski, R
b9144fb2-6ae8-44b9-a2af-126764a9a1a8
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Yan, T
9cfff593-08c6-4487-bda6-f866ea2cf648
Jones, B
3c7d1997-4778-43b1-bfc7-2890dddd49fd
Rakowski, R
b9144fb2-6ae8-44b9-a2af-126764a9a1a8
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Yan, T, Jones, B, Rakowski, R, Tudor, M, Beeby, S and White, N (2003) Metallic Triple Beam Resonator with Thick-film Printed Drive and Pickup. The 17th European Conference on Solid State Transducers (Eurosensors XVII), Guimaraes, Portugal. pp. 10-13 .

Record type: Conference or Workshop Item (Other)

Abstract

A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a simultaneous, double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The combination of these two batch-fabrication processes provides the opportunity for mass production of the device at low cost. The resonator, a dynamically balanced triple beam tuning fork (TBTF) structure 23.5 mm long and 6.5 mm wide, has a favoured mode at 4.96 kHz with a Q-factor of 3630 operating in air.

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More information

Published date: 2003
Venue - Dates: The 17th European Conference on Solid State Transducers (Eurosensors XVII), Guimaraes, Portugal, 2003-09-24
Organisations: Electronics & Computer Science

Identifiers

Local EPrints ID: 259272
URI: https://eprints.soton.ac.uk/id/eprint/259272
PURE UUID: d933ab15-a210-4d07-8cd7-743af570bba7
ORCID for S Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 20 Apr 2004
Last modified: 28 Feb 2019 01:38

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