MEMS Mechanical Sensors
MEMS Mechanical Sensors
1-58053-536-4
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
April 2004
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, Stephen, Ensell, Graham, Kraft, Michael and White, Neil
(2004)
MEMS Mechanical Sensors
(Microelectromechanical systems series),
Artech House
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More information
Published date: April 2004
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 259332
URI: http://eprints.soton.ac.uk/id/eprint/259332
ISBN: 1-58053-536-4
PURE UUID: 11f3a3f5-1f95-464f-90c2-aed13356c232
Catalogue record
Date deposited: 07 May 2004
Last modified: 09 Dec 2023 02:33
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Contributors
Author:
Stephen Beeby
Author:
Graham Ensell
Author:
Michael Kraft
Author:
Neil White
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