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MEMS Mechanical Sensors

Beeby, Stephen, Ensell, Graham, Kraft, Michael and White, Neil (2004) MEMS Mechanical Sensors, Artech House, Inc (Microelectromechanical systems series).

Record type: Book

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Published date: April 2004
Organisations: Nanoelectronics and Nanotechnology, EEE


Local EPrints ID: 259332
ISBN: 1-58053-536-4
PURE UUID: 11f3a3f5-1f95-464f-90c2-aed13356c232
ORCID for Stephen Beeby: ORCID iD
ORCID for Neil White: ORCID iD

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Date deposited: 07 May 2004
Last modified: 18 Jul 2017 09:23

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Author: Stephen Beeby ORCID iD
Author: Graham Ensell
Author: Michael Kraft
Author: Neil White ORCID iD

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