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MEMS Mechanical Sensors

MEMS Mechanical Sensors
MEMS Mechanical Sensors
1-58053-536-4
Artech House
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, Stephen, Ensell, Graham, Kraft, Michael and White, Neil (2004) MEMS Mechanical Sensors (Microelectromechanical systems series), Artech House

Record type: Book

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More information

Published date: April 2004
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 259332
URI: http://eprints.soton.ac.uk/id/eprint/259332
ISBN: 1-58053-536-4
PURE UUID: 11f3a3f5-1f95-464f-90c2-aed13356c232
ORCID for Stephen Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 07 May 2004
Last modified: 09 Dec 2023 02:33

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Contributors

Author: Stephen Beeby ORCID iD
Author: Graham Ensell
Author: Michael Kraft
Author: Neil White ORCID iD

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