Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
Moktadir, Zak
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Prakash, G.V.
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Koukharenko, Elena
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Gollasch, C.
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Bagnall, Darren
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Kraft, Michael
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Hinds, E.
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Baumberg, Jeremy
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2004
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Prakash, G.V.
4ed21020-f7a2-4c8e-a47b-1a9937d7d7dd
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Gollasch, C.
d5f2558f-e19b-44fb-9868-66a327552157
Bagnall, Darren
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Hinds, E.
19eecd8c-a0b1-4856-939b-e21cbe3060c6
Baumberg, Jeremy
44ce7dca-7035-4043-9a92-3e8a69a31f72
Moktadir, Zak, Prakash, G.V., Koukharenko, Elena, Gollasch, C., Bagnall, Darren, Kraft, Michael, Hinds, E. and Baumberg, Jeremy
(2004)
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH.
CLEO/IQEC 2004: Conference on Lasers and Electro-Optics, Quantum Electronics and Laser Science, San Francisco, 16-21 May 2004, San Francisco.
16 - 21 May 2004.
Record type:
Conference or Workshop Item
(Paper)
Abstract
We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
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More information
Published date: 2004
Venue - Dates:
CLEO/IQEC 2004: Conference on Lasers and Electro-Optics, Quantum Electronics and Laser Science, San Francisco, 16-21 May 2004, San Francisco, 2004-05-16 - 2004-05-21
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 259874
URI: http://eprints.soton.ac.uk/id/eprint/259874
PURE UUID: ac753964-252e-41cf-a3c9-6ed22a347673
Catalogue record
Date deposited: 27 Oct 2004
Last modified: 04 Jul 2023 17:21
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Contributors
Author:
Zak Moktadir
Author:
G.V. Prakash
Author:
Elena Koukharenko
Author:
C. Gollasch
Author:
Darren Bagnall
Author:
Michael Kraft
Author:
E. Hinds
Author:
Jeremy Baumberg
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