The University of Southampton
University of Southampton Institutional Repository

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Prakash, G.V.
4ed21020-f7a2-4c8e-a47b-1a9937d7d7dd
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Gollasch, C.
d5f2558f-e19b-44fb-9868-66a327552157
Bagnall, Darren
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Hinds, E.
19eecd8c-a0b1-4856-939b-e21cbe3060c6
Baumberg, Jeremy
44ce7dca-7035-4043-9a92-3e8a69a31f72
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Prakash, G.V.
4ed21020-f7a2-4c8e-a47b-1a9937d7d7dd
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Gollasch, C.
d5f2558f-e19b-44fb-9868-66a327552157
Bagnall, Darren
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Hinds, E.
19eecd8c-a0b1-4856-939b-e21cbe3060c6
Baumberg, Jeremy
44ce7dca-7035-4043-9a92-3e8a69a31f72

Moktadir, Zak, Prakash, G.V., Koukharenko, Elena, Gollasch, C., Bagnall, Darren, Kraft, Michael, Hinds, E. and Baumberg, Jeremy (2004) Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH. CLEO/IQEC 2004, United States.

Record type: Conference or Workshop Item (Paper)

Full text not available from this repository.

More information

Published date: 2004
Venue - Dates: CLEO/IQEC 2004, United States, 2004-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 259874
URI: http://eprints.soton.ac.uk/id/eprint/259874
PURE UUID: ac753964-252e-41cf-a3c9-6ed22a347673

Catalogue record

Date deposited: 27 Oct 2004
Last modified: 24 Jun 2020 16:33

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×