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Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH.

Moktadir, Zak, Prakash, G V, Koukharenko, Elena, Gollasch, C, Bagnall, Darren, Kraft, Michael, Hinds, E and Baumberg, Jeremy (2004) Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH. At Proceedings CLEO/IQEC 2004, United States.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 2004
Additional Information: Event Dates: 2004
Venue - Dates: Proceedings CLEO/IQEC 2004, United States, 2004-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 259874
URI: http://eprints.soton.ac.uk/id/eprint/259874
PURE UUID: ac753964-252e-41cf-a3c9-6ed22a347673

Catalogue record

Date deposited: 27 Oct 2004
Last modified: 18 Jul 2017 09:19

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Contributors

Author: Zak Moktadir
Author: G V Prakash
Author: Elena Koukharenko
Author: C Gollasch
Author: Darren Bagnall
Author: Michael Kraft
Author: E Hinds
Author: Jeremy Baumberg

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