Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH.


Moktadir, Zak, Prakash, G V, Koukharenko, Elena, Gollasch, C, Bagnall, Darren, Kraft, Michael, Hinds, E and Baumberg, Jeremy (2004) Fabrication of miromirrors with pyramidal shape using anisotropic etching of silicon with KOH. At Proceedings CLEO/IQEC 2004, United States.

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Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 2004
Venue - Dates: Proceedings CLEO/IQEC 2004, United States, 2004-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 259874
Date :
Date Event
2004Published
Date Deposited: 27 Oct 2004
Last Modified: 17 Apr 2017 22:23
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259874

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