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Advanced control systems for MEMS capacitive sensing accelerometers

Advanced control systems for MEMS capacitive sensing accelerometers
Advanced control systems for MEMS capacitive sensing accelerometers
232-234
Mokhtari, M E
0b941a88-89a5-4214-8cd1-a25b62a27dd0
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Mokhtari, M E
0b941a88-89a5-4214-8cd1-a25b62a27dd0
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Mokhtari, M E and Kraft, Michael (2003) Advanced control systems for MEMS capacitive sensing accelerometers. Proceedings Micromechanics Europe (MME), 232-234.

Record type: Article

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Published date: October 2003
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 259883
URI: http://eprints.soton.ac.uk/id/eprint/259883
PURE UUID: 9c2a3980-a363-49c3-90ea-a0d5440a59ba

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Date deposited: 01 Sep 2004
Last modified: 24 Jun 2020 16:33

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