A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
(2004) A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips At 15th MicroMechanics Europe Workshop , pp. 33-36.
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We present a micromachined three-dimensional electrostatic actuator optimized for aligning and tuning optical microcavities on atom chips. The actuation in the chip plane which is used for miror positioning has a working envelope of 17 m. The design incorporates a unique locking mechanism which allows the out-of-plane actuation used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 m can be achieved in this direction.
|Item Type:||Conference or Workshop Item (Paper)|
|Additional Information:||Event Dates: 5 - 7 September 2004|
|Date Deposited:||13 Sep 2004|
|Last Modified:||31 Mar 2016 14:01|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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