A high performance accelerometer with fifth-order sigma-delta modulator
A high performance accelerometer with fifth-order sigma-delta modulator
To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE) and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to better Signal to Quantization Noise Ratio (SQNR).
Key words: Micromachined accelerometer, sigma-delta modulator.
41-44
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Gollasch, Carsten
cecc53e7-6ddd-417d-a9ac-d24b9e2ad032
2004
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Gollasch, Carsten
cecc53e7-6ddd-417d-a9ac-d24b9e2ad032
Dong, Yufeng, Kraft, Michael and Gollasch, Carsten
(2004)
A high performance accelerometer with fifth-order sigma-delta modulator.
15th MicroMechanics Europe Workshop, , Leuven, Belgium.
04 - 06 Sep 2004.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE) and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to better Signal to Quantization Noise Ratio (SQNR).
Key words: Micromachined accelerometer, sigma-delta modulator.
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More information
Published date: 2004
Additional Information:
Event Dates: 5 - 7 September 2004
Venue - Dates:
15th MicroMechanics Europe Workshop, , Leuven, Belgium, 2004-09-04 - 2004-09-06
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 259929
URI: http://eprints.soton.ac.uk/id/eprint/259929
PURE UUID: 39157b23-68c0-4d88-ab0d-8a157bde5b7b
Catalogue record
Date deposited: 13 Sep 2004
Last modified: 10 Dec 2021 21:07
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Contributors
Author:
Yufeng Dong
Author:
Michael Kraft
Author:
Carsten Gollasch
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