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A high performance accelerometer with fifth-order sigma-delta modulator

Dong, Yufeng, Kraft, Michael and Gollasch, Carsten (2004) A high performance accelerometer with fifth-order sigma-delta modulator At 15th MicroMechanics Europe Workshop, Belgium. 05 - 07 Sep 2004. , pp. 41-44.

Record type: Conference or Workshop Item (Paper)


To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE)and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to beter Signal to Quantization Noise Ratio (SQNR). Key words: Micromachined accelerometer, sigma-delta modulator.

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Published date: 2004
Additional Information: Event Dates: 5 - 7 September 2004
Venue - Dates: 15th MicroMechanics Europe Workshop, Belgium, 2004-09-05 - 2004-09-07
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 259929
PURE UUID: 39157b23-68c0-4d88-ab0d-8a157bde5b7b

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Date deposited: 13 Sep 2004
Last modified: 18 Jul 2017 09:18

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Author: Yufeng Dong
Author: Michael Kraft
Author: Carsten Gollasch

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