Dong, Yufeng, Kraft, Michael and Gollasch, Carsten
A High performance accelerometer with fifth-order Sigma-Delta Modulator
At 15th MicroMechanics Europe Workshop, Belgium.
05 - 07 Sep 2004.
Full text not available from this repository.
To verify the effectiveness of higher-order electromechanical sigma-delta modulator (EAM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below static sensitivity 20pF/g and resonant frequency 325Hz. Analyses are performed to these key parameters. The silicon-on-glass sensor is fabricated by Deep Reactive Ion Etching (DRIE)and anodic bonding. Compared with a second-order electro-mechanical EAM, which only uses mechanical integration, the sensor is cascaded with additional electronic integrators to form a fifth-order electromechanical EAM, which leads to beter Signal to Quantization Noise Ratio (SQNR). Key words: Micromachined accelerometer, sigma-delta modulator.
Conference or Workshop Item
||Event Dates: 5 - 7 September 2004
|Venue - Dates:
||15th MicroMechanics Europe Workshop, Belgium, 2004-09-05 - 2004-09-07
||Nanoelectronics and Nanotechnology
||13 Sep 2004
||17 Apr 2017 22:23
|Further Information:||Google Scholar|
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