Gollasch, C O, Moktadir, Zak, Koukharenko, Elena, Kraft, Michael, Bagnall, Darren, Eriksson, S, Trupke, M and Hinds, E A
Integration of a two-dimensional electrostatic actuator in a new generation of atom chips
At Eurosensors XVIII, Italy.
13 - 15 Sep 2004.
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Summary: In this paper we present an integrated atom chip design which incorporates a micromachined electrostatic actuator for optical cavity alignment. The two-dimensional actuator is fabricated by applying deep reactive ion etching techniques (DRIE) on a silicon-on-glass wafer. An actution of 17.5 um is achievable which is sufficient to compensate for the misalignment of the optical cavity during the fabrication process.
Conference or Workshop Item
||Event Dates: 13 - 15 September 2004
|Venue - Dates:
||Eurosensors XVIII, Italy, 2004-09-13 - 2004-09-15
||atom chip, actuator, electrostatic
||Nanoelectronics and Nanotechnology, EEE
||10 Feb 2005
||17 Apr 2017 22:20
|Further Information:||Google Scholar|
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