Solid-State Electronic Interface For A Levitated Disc Accelerometer
Solid-State Electronic Interface For A Levitated Disc Accelerometer
An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6µm CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
capacitive MEMS interfaces, switched capacitor circuits, modulators
Gindila, M.V.
ebecb5d1-1ac2-42cc-875d-2b52b2f77a1b
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Houlihan, R.
45f45372-ef48-40c1-9f7a-fdc6178e74c7
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
2004
Gindila, M.V.
ebecb5d1-1ac2-42cc-875d-2b52b2f77a1b
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Houlihan, R.
45f45372-ef48-40c1-9f7a-fdc6178e74c7
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W.
(2004)
Solid-State Electronic Interface For A Levitated Disc Accelerometer.
Eurosensors XVII, Rome, Italy.
12 - 14 Sep 2004.
Record type:
Conference or Workshop Item
(Paper)
Abstract
An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6µm CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
This record has no associated files available for download.
More information
Published date: 2004
Additional Information:
Event Dates: 13th-15th September 2004
Venue - Dates:
Eurosensors XVII, Rome, Italy, 2004-09-12 - 2004-09-14
Keywords:
capacitive MEMS interfaces, switched capacitor circuits, modulators
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 259988
URI: http://eprints.soton.ac.uk/id/eprint/259988
PURE UUID: 5371b0ce-5b70-4bb1-827e-d8f1d88f0671
Catalogue record
Date deposited: 28 Oct 2004
Last modified: 10 Dec 2021 21:07
Export record
Contributors
Author:
M.V. Gindila
Author:
M. Kraft
Author:
R. Houlihan
Author:
W. Redman-White
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics