Solid-State Electronic Interface For A Levitated Disc Accelerometer

Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer At Eurosensors XVII, Italy. 13 - 15 Sep 2004.


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An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 13th-15th September 2004
Venue - Dates: Eurosensors XVII, Italy, 2004-09-13 - 2004-09-15
Keywords: capacitive MEMS interfaces, switched capacitor circuits, modulators
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 259988
Date :
Date Event
Date Deposited: 28 Oct 2004
Last Modified: 17 Apr 2017 22:20
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