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Solid-State Electronic Interface For A Levitated Disc Accelerometer

Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer At Eurosensors XVII, Italy. 13 - 15 Sep 2004.

Record type: Conference or Workshop Item (Paper)


An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.

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Published date: 2004
Additional Information: Event Dates: 13th-15th September 2004
Venue - Dates: Eurosensors XVII, Italy, 2004-09-13 - 2004-09-15
Keywords: capacitive MEMS interfaces, switched capacitor circuits, modulators
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 259988
PURE UUID: 5371b0ce-5b70-4bb1-827e-d8f1d88f0671

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Date deposited: 28 Oct 2004
Last modified: 18 Jul 2017 09:17

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Author: M.V. Gindila
Author: M. Kraft
Author: R. Houlihan
Author: W. Redman-White

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