Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W.
Solid-State Electronic Interface For A Levitated Disc Accelerometer
At Eurosensors XVII, Italy.
13 - 15 Sep 2004.
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An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6um CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
Conference or Workshop Item
||Event Dates: 13th-15th September 2004
|Venue - Dates:
||Eurosensors XVII, Italy, 2004-09-13 - 2004-09-15
||capacitive MEMS interfaces, switched capacitor circuits, modulators
||Nanoelectronics and Nanotechnology
||28 Oct 2004
||17 Apr 2017 22:20
|Further Information:||Google Scholar|
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