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Solid-State Electronic Interface For A Levitated Disc Accelerometer

Solid-State Electronic Interface For A Levitated Disc Accelerometer
Solid-State Electronic Interface For A Levitated Disc Accelerometer
An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6µm CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.
capacitive MEMS interfaces, switched capacitor circuits, modulators
Gindila, M.V.
ebecb5d1-1ac2-42cc-875d-2b52b2f77a1b
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Houlihan, R.
45f45372-ef48-40c1-9f7a-fdc6178e74c7
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Gindila, M.V.
ebecb5d1-1ac2-42cc-875d-2b52b2f77a1b
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Houlihan, R.
45f45372-ef48-40c1-9f7a-fdc6178e74c7
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf

Gindila, M.V., Kraft, M., Houlihan, R. and Redman-White, W. (2004) Solid-State Electronic Interface For A Levitated Disc Accelerometer. Eurosensors XVII, Italy. 13 - 15 Sep 2004.

Record type: Conference or Workshop Item (Paper)

Abstract

An IC electronic interface for a micromachined levitated disc accelerometer, using a 0.6µm CMOS technology from AustriaMicroSystems is presented. The system is based on a second order electromechanical modulator, and as the disc is electrostatically levitated there is no ohmic contact between the disc and the rest of the system. This distinguishes the pick-off circuit from a typical capacitive MEMS interface.

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More information

Published date: 2004
Additional Information: Event Dates: 13th-15th September 2004
Venue - Dates: Eurosensors XVII, Italy, 2004-09-13 - 2004-09-15
Keywords: capacitive MEMS interfaces, switched capacitor circuits, modulators
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 259988
URI: https://eprints.soton.ac.uk/id/eprint/259988
PURE UUID: 5371b0ce-5b70-4bb1-827e-d8f1d88f0671

Catalogue record

Date deposited: 28 Oct 2004
Last modified: 02 Jul 2018 16:32

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